The H112 microscope stage offers a travel range >300 × 300 mm for precision scanning of semiconductor wafers, photomasks, flat-panel displays, and printed circuit boards. Using patented Intelligent Scanning Technology (IST), it accommodates wafers up to 300 mm diameter and samples up to 25 kg, and works with many robot arm wafer loaders.
Prior Scientific
Rockland, MA
www.prior.com