Zygo Corp., a technology leader in Displacement Measuring Interferometry, has introduced the ZMI 4004 measurement electronics. The ZMI 4004 is designed to meet the most demanding stage metrology requirements for Next Generation Lithography (NGL) and semiconductor test equipment.
The International Roadmap for Semiconductors (ITRS) highlights overlay as one of the key challenging specifications for NGL development. The performance of the ZMI 4004 provides the ability to meet the overlay requirements by offering unmatched linear resolution, velocity and synchronization capabilities.
Bruce Robinson, Zygo's president and CEO stated: "As lithography trends continue to demand smaller feature sizes, higher throughputs and improved accuracy the performance of the ZMI 4004 measurement electronics will be required. The introduction of the ZMI 4004 gives our customers the flexibility to design their NGL and test equipment around a product that meets their demanding stage metrology requirements."
Zygo, headquartered in Middlefield, CT, is a worldwide developer and supplier of high precision optics, optical, and fiber optic assemblies, high performance metrology instruments, and automation for the telecommunications, semiconductor, and industrial markets.
See Zygo's web site at www.zygo.com for additional information.