AU200-100x100 XY alignment stages are capable of 1 µm resolution and 2 µm repeatability. Preloaded V-groove and crossed roller bearings provide precision and stiffness. The 80 mm tables have a footprint of 348 × 348 mm and they have a 188 × 188 mm open aperture.
OES (Optimal Engineering Systems)
Van Nuys, CA